Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11478895 | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya | 2022-10-25 |
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Makoto Fukushima, Kazuto Hirokawa | 2022-10-18 |