Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Shingo Togashi, Makoto Fukushima | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Shingo Togashi, Makoto Fukushima | 2022-10-18 |