Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11472000 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Makoto Fukushima, Osamu Nabeya | 2022-10-18 |
| 11472002 | Substrate polishing apparatus | Hiroshi Aono, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa | 2022-10-18 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2022-08-30 |
| D954567 | Measurement jig | — | 2022-06-14 |
| 11325224 | Method of monitoring a dressing process and polishing apparatus | — | 2022-05-10 |