Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532491 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Hisajiro Nakano | 2022-12-20 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2022-08-30 |
| 11380559 | Carrier device, work processing apparatus, control method of carrier device and storage medium storing program | Yohei Eto, Teruaki HOMBO, Keiji Kanazawa | 2022-07-05 |