Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532491 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Junji Kunisawa | 2022-12-20 |
| 11495475 | Method of cleaning a substrate | Koji Maeda, Hiroshi Shimomoto, Masayoshi Imai, Yoichi Shiokawa | 2022-11-08 |
| 11311918 | Substrate cleaning apparatus and substrate cleaning method | — | 2022-04-26 |