Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532784 | Substrate processing apparatus and method | Manabu Nakagawasai, Shinji Orimoto, Motoi YAMAGATA | 2022-12-20 |
| 11495475 | Method of cleaning a substrate | Hiroshi Shimomoto, Hisajiro Nakano, Masayoshi Imai, Yoichi Shiokawa | 2022-11-08 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara, Motoi YAMAGATA | 2022-08-16 |
| 11319458 | Method for fabricating semiconductor device chips and protective composition | Teru Sakakibara, Shinya Komabiki, Hidehiko Karasaki | 2022-05-03 |
| 11309199 | Substrate transfer apparatus and substrate transfer method | Keita Horiuchi, Morihiro Takanashi | 2022-04-19 |
| 11251027 | Stage device and processing apparatus | Tatsuo Hatano, Naoki Watanabe | 2022-02-15 |