Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495475 | Method of cleaning a substrate | Koji Maeda, Hiroshi Shimomoto, Hisajiro Nakano, Masayoshi Imai | 2022-11-08 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Toru Maruyama, Nobuyuki Takahashi | 2022-09-20 |