Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515746 | Cooling mechanism for vehicle electric motor | Junichi Yokota, Yasunari FURUTA | 2022-11-29 |
| 11465254 | Polishing machine and a polishing method for a substrate | Itsuki Kobata, Katsuhide Watanabe, Hozumi Yasuda, Yuji Yagi, Koichi Takeda | 2022-10-11 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama | 2022-09-20 |
| 11413720 | Polishing apparatus | Toshifumi Kimba, Masaki Kinoshita | 2022-08-16 |
| 11221239 | Substrate processing apparatus and method of detecting indentation formed in substrate | Zhongxin Wen, Suguru Sakugawa | 2022-01-11 |