Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11465254 | Polishing machine and a polishing method for a substrate | Katsuhide Watanabe, Hozumi Yasuda, Yuji Yagi, Nobuyuki Takahashi, Koichi Takeda | 2022-10-11 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2022-09-20 |