Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517940 | Substrate cleaning device | Shuji Uozumi, Yasuyuki Motoshima | 2022-12-06 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi | 2022-09-20 |
| 11383345 | Cleaning apparatus for heat exchanger and polishing apparatus | Yasuyuki Motoshima, Keisuke Kamiki, Shuji Uozumi | 2022-07-12 |
| 11262105 | Cryocooler and cryocooler pipe system | — | 2022-03-01 |