Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517940 | Substrate cleaning device | Shuji Uozumi, Toru Maruyama | 2022-12-06 |
| 11383345 | Cleaning apparatus for heat exchanger and polishing apparatus | Toru Maruyama, Keisuke Kamiki, Shuji Uozumi | 2022-07-12 |