Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221239 | Substrate processing apparatus and method of detecting indentation formed in substrate | Nobuyuki Takahashi, Suguru Sakugawa | 2022-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221239 | Substrate processing apparatus and method of detecting indentation formed in substrate | Nobuyuki Takahashi, Suguru Sakugawa | 2022-01-11 |