Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532784 | Substrate processing apparatus and method | Koji Maeda, Shinji Orimoto, Motoi YAMAGATA | 2022-12-20 |
| 11417504 | Stage device and processing apparatus | Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara, Motoi YAMAGATA, Koji Maeda | 2022-08-16 |
| 11293092 | Stage device and processing apparatus | Naoyuki Suzuki, Shinji Orimoto | 2022-04-05 |