Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532784 | Substrate processing apparatus and method | Manabu Nakagawasai, Koji Maeda, Shinji Orimoto | 2022-12-20 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara, Koji Maeda | 2022-08-16 |