Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414747 | Sputtering device | Junichi Takei, Hiroshi Sone, Shinji Orimoto | 2022-08-16 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Shinji Orimoto, Hiroyuki Yokohara, Motoi YAMAGATA, Koji Maeda | 2022-08-16 |
| 11293092 | Stage device and processing apparatus | Manabu Nakagawasai, Shinji Orimoto | 2022-04-05 |
| 11282733 | Stage mechanism, processing apparatus, and method of operating the stage mechanism | Yuuki Motomura, Hiroshi Sone, Yasuyuki Kagaya | 2022-03-22 |