Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404255 | Sputtering method and sputtering apparatus | Kazunaga ONO, Atsushi Gomi, Tatsuo Hatano, Yasuhiro Otagiri, Tomoyuki Fujihara | 2022-08-02 |
| 11282733 | Stage mechanism, processing apparatus, and method of operating the stage mechanism | Hiroshi Sone, Yasuyuki Kagaya, Naoyuki Suzuki | 2022-03-22 |