Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410837 | Film-forming device | Hiroyuki Toshima, Tetsuya Miyashita, Shinji Furukawa, Junichi Takei | 2022-08-09 |
| 11404255 | Sputtering method and sputtering apparatus | Kazunaga ONO, Atsushi Gomi, Yasuhiro Otagiri, Tomoyuki Fujihara, Yuuki Motomura | 2022-08-02 |
| 11251027 | Stage device and processing apparatus | Naoki Watanabe, Koji Maeda | 2022-02-15 |