Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512388 | Film forming apparatus and film forming method | Masato SHINADA | 2022-11-29 |
| 11495446 | Film formation device and film formation method | Masato SHINADA, Einstein Noel Abarra | 2022-11-08 |
| 11479848 | Film forming apparatus and method | Shota ISHIBASHI, Hiroyuki Iwashita, Tatsuo Hirasawa | 2022-10-25 |
| 11469106 | Hard mask and hard mask forming method | Shinji Furukawa | 2022-10-11 |
| 11410837 | Film-forming device | Tatsuo Hatano, Tetsuya Miyashita, Shinji Furukawa, Junichi Takei | 2022-08-09 |