YK

Yasuyuki Kagaya

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #204,268 of 548,613Top 40%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11282733 Stage mechanism, processing apparatus, and method of operating the stage mechanism Yuuki Motomura, Hiroshi Sone, Naoyuki Suzuki 2022-03-22