Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414747 | Sputtering device | Junichi Takei, Naoyuki Suzuki, Shinji Orimoto | 2022-08-16 |
| 11282733 | Stage mechanism, processing apparatus, and method of operating the stage mechanism | Yuuki Motomura, Yasuyuki Kagaya, Naoyuki Suzuki | 2022-03-22 |