Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11465256 | Apparatus for polishing and method for polishing | Pohan Chen, Tadakazu Sone | 2022-10-11 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2022-08-30 |