Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11472002 | Substrate polishing apparatus | Hiroyuki Shinozaki, Hiroshi Aono, Kenji Shinkai, Hideo Aizawa | 2022-10-18 |
| 11465256 | Apparatus for polishing and method for polishing | Hiroshi Sotozaki, Pohan Chen | 2022-10-11 |