Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11436392 | Substrate processing apparatus and storage medium having program stored therein | Yu Ishii, Keisuke Uchiyama, Kunio Oishi | 2022-09-06 |
| 11260493 | Substrate processing apparatus and control method | Minoru Harada, Takahiro Nanjo, Naoki Matsuda | 2022-03-01 |