Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11461647 | Method of constructing prediction model that predicts number of plateable substrates, method of constructing selection model for predicting component that causes failure, and method of predicting number of plateable substrates | Masashi Shimoyama, Ryuya Koizumi | 2022-10-04 |
| 11436392 | Substrate processing apparatus and storage medium having program stored therein | Yu Ishii, Keisuke Uchiyama, Hiroyuki Takenaka | 2022-09-06 |