Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11436392 | Substrate processing apparatus and storage medium having program stored therein | Yu Ishii, Kunio Oishi, Hiroyuki Takenaka | 2022-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11436392 | Substrate processing apparatus and storage medium having program stored therein | Yu Ishii, Kunio Oishi, Hiroyuki Takenaka | 2022-09-06 |