Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535949 | Substrate holder and plating apparatus | Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata | 2022-12-27 |
| 11511386 | Polishing apparatus and polishing method | Masayuki Nakanishi, Makoto Kashiwagi | 2022-11-29 |
| 11230789 | Method of removing liquid from seal of a substrate holder | Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata | 2022-01-25 |