Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535949 | Substrate holder and plating apparatus | Masaya Seki, Hideki Takayanagi, Masayuki Satake, Jumpei Fujikata | 2022-12-27 |
| 11385125 | Leak check method, leak check apparatus, plating method, and plating apparatus | Jumpei Fujikata | 2022-07-12 |
| 11230789 | Method of removing liquid from seal of a substrate holder | Masaya Seki, Hideki Takayanagi, Masayuki Satake, Jumpei Fujikata | 2022-01-25 |