Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139313 | Method of manufacturing semiconductor memory | Sunghil Lee, Syuji NOZAWA, Nagisa Sato | 2021-10-05 |
| 11136668 | Film-forming apparatus and film-forming method | Reiji Niino, Yoji IIZUKA | 2021-10-05 |
| 11114319 | Heat treatment apparatus and heat treatment method | Yasuaki Kikuchi, Koji Yoshii, Wataru Nakajima, Norio Baba | 2021-09-07 |
| 11079850 | Input apparatus | Tetsuya TOMARU | 2021-08-03 |
| 11081321 | Substrate processing apparatus | Syuji NOZAWA, Yoji IIZUKA | 2021-08-03 |
| 11069536 | Device manufacturing method | Sunghil Lee, Nagisa Sato, Syuji NOZAWA | 2021-07-20 |
| 11056349 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto | 2021-07-06 |
| 10960435 | Film forming apparatus, film forming method, and storage medium | Makoto Fujikawa, Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA | 2021-03-30 |
| 10957531 | Method of manufacturing semiconductor device | Syuji NOZAWA, Nagisa Sato | 2021-03-23 |
| 10910259 | Semiconductor device manufacturing method | Koichi Yatsuda, Yannick Feurprier, Frederic Lazzarino, Jean-Francois de Marneffe, Khashayar Babaei Gavan | 2021-02-02 |
| 10898863 | Hollow-fiber membrane and hollow-fiber module for cell culture | Makiko Hiraoka, Noriaki Kato | 2021-01-26 |