Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136668 | Film-forming apparatus and film-forming method | Tatsuya Yamaguchi, Yoji IIZUKA | 2021-10-05 |
| 11056349 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2021-07-06 |
| 10960435 | Film forming apparatus, film forming method, and storage medium | Makoto Fujikawa, Hiroyuki Hashimoto, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-03-30 |