Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171050 | Method for manufacturing a contact pad, method for manufacturing a semiconductor device using same, and semiconductor device | Takashi Hayakawa, Mitsuaki Iwashita, Takashi Tanaka | 2021-11-09 |
| 11120999 | Plasma etching method | Kaoru Maekawa, Nagisa Sato, Kumiko Ono, Shigeru Tahara, Jacques Faguet +4 more | 2021-09-14 |
| 11056349 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2021-07-06 |
| 11004684 | Forming method of hard mask | Mitsuaki Iwashita, Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Kazutoshi Iwai +1 more | 2021-05-11 |
| 10910259 | Semiconductor device manufacturing method | Tatsuya Yamaguchi, Yannick Feurprier, Frederic Lazzarino, Jean-Francois de Marneffe, Khashayar Babaei Gavan | 2021-02-02 |