Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139313 | Method of manufacturing semiconductor memory | Sunghil Lee, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-10-05 |
| 11120999 | Plasma etching method | Koichi Yatsuda, Kaoru Maekawa, Kumiko Ono, Shigeru Tahara, Jacques Faguet +4 more | 2021-09-14 |
| 11069536 | Device manufacturing method | Sunghil Lee, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-07-20 |
| 10957531 | Method of manufacturing semiconductor device | Syuji NOZAWA, Tatsuya Yamaguchi | 2021-03-23 |