Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120999 | Plasma etching method | Koichi Yatsuda, Kaoru Maekawa, Nagisa Sato, Kumiko Ono, Shigeru Tahara +4 more | 2021-09-14 |
| 10896824 | Roughness reduction methods for materials using illuminated etch solutions | Omid Zandi | 2021-01-19 |