Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139313 | Method of manufacturing semiconductor memory | Sunghil Lee, Tatsuya Yamaguchi, Nagisa Sato | 2021-10-05 |
| 11081321 | Substrate processing apparatus | Yoji IIZUKA, Tatsuya Yamaguchi | 2021-08-03 |
| 11069536 | Device manufacturing method | Sunghil Lee, Tatsuya Yamaguchi, Nagisa Sato | 2021-07-20 |
| 10960435 | Film forming apparatus, film forming method, and storage medium | Makoto Fujikawa, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2021-03-30 |
| 10957531 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Nagisa Sato | 2021-03-23 |