Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136668 | Film-forming apparatus and film-forming method | Tatsuya Yamaguchi, Reiji Niino | 2021-10-05 |
| 11081321 | Substrate processing apparatus | Syuji NOZAWA, Tatsuya Yamaguchi | 2021-08-03 |
| 11035041 | Film-forming apparatus and film-forming method | — | 2021-06-15 |