Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10960435 | Film forming apparatus, film forming method, and storage medium | Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10960435 | Film forming apparatus, film forming method, and storage medium | Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-03-30 |