Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056349 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2021-07-06 |