Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204545 | EUV photo masks and manufacturing method thereof | Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee | 2021-12-21 |
| 11143954 | Mask patterns and method of manufacture | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2021-10-12 |
| 11119398 | EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Ping-Hsun Lin, Tzu Yi Wang | 2021-09-14 |
| 11106126 | Method of manufacturing EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Tzu Yi Wang | 2021-08-31 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Chi-Kuang Tsai, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |