Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119398 | EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Ping-Hsun Lin, Ta-Cheng Lien | 2021-09-14 |
| 11106126 | Method of manufacturing EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2021-08-31 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Chi-Kuang Tsai, Ta-Cheng Lien, Jong-Yuh Chang +1 more | 2021-06-29 |