Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204545 | EUV photo masks and manufacturing method thereof | Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Ta-Cheng Lien, Hsin-Chang Lee | 2021-12-21 |
| 11143952 | Pellicle removal method | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh +2 more | 2021-10-12 |
| 11119398 | EUV photo masks | Hsin-Chang Lee, Ping-Hsun Lin, Ta-Cheng Lien, Tzu Yi Wang | 2021-09-14 |
| 11106126 | Method of manufacturing EUV photo masks | Hsin-Chang Lee, Ta-Cheng Lien, Tzu Yi Wang | 2021-08-31 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Yih-Chen Su, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |
| 11029593 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Yih-Chen Su +2 more | 2021-06-08 |