Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119398 | EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien, Tzu Yi Wang | 2021-09-14 |
| 11042084 | Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask | Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin | 2021-06-22 |