Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |
| 11029593 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Pei-Cheng Hsu +2 more | 2021-06-08 |