Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143952 | Pellicle removal method | Chue-San Yoo, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh, Pei-Cheng Hsu +2 more | 2021-10-12 |
| 11099476 | Photomask having a plurality of shielding layers | Chun-Lang Chen | 2021-08-24 |
| 11086211 | Masks and methods of forming the same | Shih-Hao Yang, Chun-Lang Chen | 2021-08-10 |