Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099476 | Photomask having a plurality of shielding layers | Chih-Chiang Tu | 2021-08-24 |
| 11086211 | Masks and methods of forming the same | Shih-Hao Yang, Chih-Chiang Tu | 2021-08-10 |
| 10969682 | Apparatus and method for developing a photoresist coated substrate | Tzung-Shiun Liu, Ching-Yueh Chen | 2021-04-06 |