Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143954 | Mask patterns and method of manufacture | Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2021-10-12 |
| 10996553 | Extreme ultraviolet mask with reduced wafer neighboring effect and method of manufacturing the same | Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2021-05-04 |