Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996553 | Extreme ultraviolet mask with reduced wafer neighboring effect and method of manufacturing the same | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2021-05-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996553 | Extreme ultraviolet mask with reduced wafer neighboring effect and method of manufacturing the same | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2021-05-04 |