Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969328 | Optical metrology tool equipped with modulated illumination sources | Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2021-04-06 |
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani +3 more | 2021-03-09 |
| 10935893 | Differential methods and apparatus for metrology of semiconductor targets | Stilian Ivanov Pandev | 2021-03-02 |
| 10895541 | Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy | Alexander Kuznetsov, Oleg Khodykin | 2021-01-19 |