Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11200658 | Model-based metrology using images | — | 2021-12-14 |
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani +3 more | 2021-03-09 |
| 10935893 | Differential methods and apparatus for metrology of semiconductor targets | Andrei V. Shchegrov | 2021-03-02 |