Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156548 | Measurement methodology of advanced nanostructures | Manh Dang Nguyen, Phillip Atkins, Liequan Lee, Natalia Malkova, Paul Aoyagi +3 more | 2021-10-26 |
| 11143604 | Soft x-ray optics with improved filtering | Boxue Chen, Nikolay Artemiev | 2021-10-12 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo, Antonio Arion Gellineau, Andrei Veldman +1 more | 2021-07-27 |
| 11036898 | Measurement models of nanowire semiconductor structures based on re-useable sub-structures | Houssam Chouaib | 2021-06-15 |
| 10983227 | On-device metrology using target decomposition | John J. Hench, Antonio Arion Gellineau | 2021-04-20 |
| 10895541 | Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Oleg Khodykin | 2021-01-19 |