Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145559 | Process monitoring of deep structures with X-ray scatterometry | Thaddeus Gerard Dziura | 2021-10-12 |
| 11099137 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Yin Xu, Kaiwen Xu +5 more | 2021-08-24 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo, Alexander Kuznetsov, Andrei Veldman +1 more | 2021-07-27 |
| 10983227 | On-device metrology using target decomposition | John J. Hench, Alexander Kuznetsov | 2021-04-20 |