AB

Alexander N. Bykanov

KL Kla-Tencor: 2 patents #13 of 134Top 10%
Overall (2021): #183,292 of 548,734Top 35%
2
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11073487 Methods and systems for characterization of an x-ray beam with high spatial resolution Nikolay Artemiev, Joseph A. Di Regolo, Antonio Arion Gellineau, Alexander Kuznetsov, Andrei Veldman +1 more 2021-07-27
10959318 X-ray metrology system with broadband laser produced plasma illuminator Oleg Khodykin 2021-03-23